Multiscale Molecular Dynamics Simulation of Plasma Processing: Application to Plasma Sputtering
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Frontiers in Physics
سال: 2018
ISSN: 2296-424X
DOI: 10.3389/fphy.2018.00059